Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik

Fabrication of UV LEDs – Semiconductor epitaxy and chip processing

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The tour covers two main segments of the process chain for the fabrication of UV LEDs. You will visit the lab where the semiconductor crystal layer structures are grown on substrate wafers using metalorganic vapor phase epitaxy. Moreover, the cleanroom for the frontend processing of these wafers will be shown which involves chip processing technologies such as photolithography or plasma etching.


Address

Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik
Gustav-Kirchhoff-Straße 4
12489 Berlin, Germany

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