Technische Universität Berlin

Deep UV-LED fabrication and testing at Technische Universität Berlin

At the lab for Experimental Nanophysics and Photonics in the Technische Universität Berlin the crystalline layer structure of LEDs is grown, LEDs are fabricated and tested. We will explain the working principle of the UV LEDs, show the systems to grow the crystalline layers, and explain the fabrication procedure from the semiconductor wafer to the LED chips. Finally we will visit the lab for electroluminescence testing and show how we acquire emission power, spectrum, and the farfield of the LEDs.


Technische Universität Berlin
Institute of Solid State Physics
Hardenbergstr. 36
10623 Berlin, Germany

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