Tour 3: Ferdinand-Braun-Institut (FBH)

Fabrication of UV LEDs – Semiconductor epitaxy and chip processing

© FBH/

The Ferdinand-Braun-Institut (FBH) is an application-oriented research institute in the fields of high-frequency electronics, photonics, and quantum physics. R&D includes high-frequency devices and circuits for communications, power electronics, and sensor technology. Moreover, FBH develops light sources from the visible to the UV spectral range: high-power diode lasers, UV light sources, and hybrid laser systems. Applications range from medical technology, materials processing and sensors to optical communications in space and integrated quantum technology. In close cooperation with industry, its research results lead to cutting-edge products.

© FBH/

The tour covers two main segments of the process chain for the fabrication of UV LEDs. You will visit the lab where the semiconductor crystal layer structures are grown on substrate wafers using metalorganic vapor phase epitaxy. Moreover, a cleanroom for the frontend processing of these wafers will be shown which involves chip processing technologies such as photolithography or plasma etching.

  • Min. number of participants: 4
  • Max. number of participants: 16
  • Time & Meetingpoint: Hotel Lobby, 09:00
  • Note:
    ⇒ Not accessible for handicapped people
    ⇒ Dressing in cleanroom clothing on site

Due to COVID-19 and other communicable diseases, access may be restricted. There are currently no access restrictions for this location, but requirements are subject to change.

Ferdinand-Braun-Institut gGmbH
Leibniz-Institut für Höchstfrequenztechnik

Gustav-Kirchhoff-Str. 4
12489 Berlin

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